以下为句子列表：
英文: A monolithic silicon multi-sensor on SOI wafer that consists of a three-axis piezoresistive accelerometer, a piezoresistive absolute pressure sensor, and a silicon thermistor temperature sensor is presented.
中文: 摘要为满足小体积、多参数测量的要求，采用SOI硅片，设计了一种测量三轴加速度、绝对压力、温度参数的单片集成硅微传感器，其中加速度、绝对压力传感器基于掺杂硅压阻效应，温度传感器基于掺杂硅电阻温度效应。
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英文: When the temperature of the medium is constant, the analysis of data presents that the diffusion coefficient of moisture increases with the reduction of absolute pressure and the rise of changing rate of pressure, among which the effect of the latter make
中文: 由数据分析可见，当介质温度一定时，木材水分扩散系数随绝对压力的减小和压力变化速率的加大而增加，且压力变化速率对扩散系数的影响大于绝对压力的影响。
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