以下为句子列表:
英文: Abstract: The progress of the aqueous solution cleaning technology for silicon wafer in very large scale integrated circuit fabrication is reviewed.The future of the aqueous solution cleaning technology is discussed as well.
中文: 文摘:本文综述了超大规模集成电路制造过程中硅片溶液清洗技术的研究历史及现状,并对技术的未来发展进行了展望。
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