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Abstract: The progress of the aqueous solution cleaning technology for silicon wafer in very large scale integrated circuit fabrication is reviewed.The future of the aqueous solution cleaning technology is discussed as well.
中文意思:
文摘:本文综述了超大规模集成电路制造过程中硅片溶液清洗技术的研究历史及现状,并对技术的未来发展进行了展望。


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Abstract: The problem of distance bias controls with overlapping structure is discussed.A decentralized LQG control scheme is proposed by using inclusion principle.The s i mulation results are given by this method for this distance bias control design. 文摘:讨论具有重叠结构的距离偏差控制问题.利用包含原理,提出一种分散LQG控制的设计方法,并给出利用该方法对距离偏差控制进行设计的仿真结果.
Abstract: The process defect,minor defect and key precess,their impact on quality and reliability,and the control method are introduced.The kdy control points,the parameter control scope and the requirement of process environment for high quality and reli 摘要:重点介绍了国内外半导体器件制造工艺与器件可靠性的相关性报道:缺陷、微缺陷、关键工艺对器件质量和可靠性的影响及其控制方法;还介绍了关键工艺控制点的确定及其参数控制范围以及生产高质量、高可靠性器件的工艺环境的控制要求。
Abstract: The process of axisymmetric drawing of anisotropic materials is considered. 文摘:研究了轴对称拉伸各向异性材料的过程。
Abstract: The process of thermal fatigue crack propagation on the surface of steel bonded carbide GJW35 under the action of thermal stress has been observed. 文摘:观察了在热应力作用下GJW35钢结硬质合金表面热疲劳裂纹扩展过程。
Abstract: The progress in nanostructured luminescent materials has been reviewed in this paper.Emphases are laid on the synthesis and characterization methods of (rare earth) doped nanostructured luminescent materials.In the meanwhile,the properties and a 文摘:本文综述了纳米发光材料的研究进展情况,着重总结了(稀土)掺杂型纳米发光材料的制备方法和表征手段,同时介绍了这些纳米发光材料的性质和应用,并对其未来发展趋势进行了展望。
Abstract: The progress of the aqueous solution cleaning technology for silicon wafer in very large scale integrated circuit fabrication is reviewed.The future of the aqueous solution cleaning technology is discussed as well. 文摘:本文综述了超大规模集成电路制造过程中硅片溶液清洗技术的研究历史及现状,并对技术的未来发展进行了展望。
Abstract: The propagation properties of coherent and incoherent flattened Gaussian beams have been studied in detail. 文摘:对完全相干和非相干平顶高斯光束的传输特性作了详细研究。
Abstract: The property of silk fabric grafted (Cross-Linked) with hydroxypropyl methacrylate and protein at different rate of weigh gain,by measuring strength and elongation at break,dyeability,elastic,moisturecontent,whiteness,permeability of gas,IR and 文摘:通过对织物的拉伸特性、吸湿性、弹性、染色性、白度、透气性、红外和X射线衍射的研究,探讨了在不同增重率条件下甲基丙烯酸羟丙酯在丝蛋白存在下与真丝绸接枝交联后的结构及其特性的影响。
Abstract: The purity and granularity of the salt product is relative and it also important to the salt enterprise. This paper expatiates the control of granularity according design and operation. 文摘:提高盐产品的纯度和粒度是相互关联的,也是制盐企业追求的,文章从结晶的机理着手,从设计和操作两方面阐述如何控制盐品粒度.
Abstract: The quality of hearth roll of continuous annealing furnace is one of major factors that affect work rates and surface quality of products. 摘要:硅钢连续退火炉的炉底辊质量是影响作业率和产品表面质量的主要因素之一。
Abstract: The question obtains which through the information age financial control system characteristic, analyzes which the financial software to have developed the course and at present financial control information faces. 摘要:通过信息时代的财务管理系统的特点入手,分析了财务软件发展的历程和目前财务管理信息面临的问题。
 
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