以下为句子列表：
英文: The growth of carbon nanotubes at low temperature was studied by thermal chemical vapor deposition and plasma chemical vapor deposition methods.
中文: 本论文分别以化学气相沉积法及电浆辅助化学气相沉积法探讨于低温下合成奈米碳管。
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英文: The implementation of fluorine generation technology for chemical vapor deposition (CVD) chamber cleaning applications poses significant new challenges with regard to safety, reliability, purity and overall cost of ownership.
中文: 摘要对于将氟气应用在化学气相沉积器清洗的应用而言，其安全性、稳定性、纯度和价格，在应用上是一个新的挑战。
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英文: Thin SiN layers and nitride-based multiquantum well (MQW) light emitting diode (LED) structures with conventional single GaN buffer and GaN/SiN double buffers were grown on sapphire substrates by metalorganic chemical vapor deposition (MOCVD).
中文: 摘要以有机金属化学气象沉积在蓝宝石基板上成长由单一氮化镓成核层与氮化镓/氮化矽双缓冲层所形成的两种不同氮基础的多层量子井发光二极体结构。
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英文: We conclude that due to the competition between the surface oxide removal and the Ge deposition, GeH4-based clean is not suitable for high quality Si epitaxial growth by chemical vapor deposition techniques.
中文: 同样，我们证实了当表面氧覆盖在一定的值以下时，在清洗之后的外延层生长不需要清洗的很好有效表征。
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