以下为句子列表：
英文: Besides, silicon substrate is bent by applying external mechanical stress, the lattice of channel will have strain due to uniaxial tensile stress by NMOS and strain due to uniaxial compressive stress by PMOS.
中文: 但微影技术已经接近瓶颈，所以我们必须另外寻找能够提升电晶体效能的方法，应变矽就是目前提升电晶体性能最热门的方法。
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英文: Like every other step in chipmaking, membrane fabrication takes place by building up thin layers of either conducting or insulating materials (typically metals or silicon dioxide) on a silicon substrate and then etching them away to create structures such
中文: 制造薄膜就和其他制造晶片的步骤一样，也是在矽基板上镀上一层薄薄的导电或绝缘材料（通常是金属或二氧化矽），再加以蚀刻，制造出以线路相连的电晶体结构。
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英文: The damage profile of silicon substrate induced by 0MeV Er + at a dose of ×0 /cm is extracted using the multiple scattering dechannelling model of Feldman,and the result is in good agreement with the TRIM9 calculation.
中文: 采用多重散射模型计算了 Me V × 0 / cm 注入硅 (0 0 )引起的损伤分布 ,并与 TRIM9模拟得到的结果进行了比较 .
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