以下为句子列表：
英文: The theoretical analysis method is used to study the electro-thermally excited mechanism of silicon microcantilever beam so as to obtain the temperature field distribution under the electro-thermal excitation of the microcantilever beam and to deduce ther
中文: 摘要用理论分析方法研究了硅微悬臂梁的电热激振机理，得到了微机械悬臂梁电热激励下的温度场分布，并推导出了镀膜双层硅微悬臂梁的电热激励热力矩。
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