以下为句子列表:
英文: Simulation and experiments show that for point array or hole array patterns with the same sizes maskless interference photolithography is much simple than the traditional photolithography.
中文: 模拟和实验结果表明,对点阵或孔阵图形,在同样的图形尺度下,无掩模干涉光刻比传统光刻简单得多。
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英文: The beam division method in maskless laser interference photolithography can be divided into wave-front division and amplitude division.
中文: 摘要无掩模激光干涉光刻中的分束方法一般有波前分割和振幅分割。
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