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| Abstract: In this paper, the property of silicon micro capacitive accelerometer is analyzed and discussed by establishing the model of sensor, laying the foundation for optimization design of sensor system structure. |
中文意思：
文摘:通过建立传感器的力学模型，对硅微电容式加速度传感器的特性作了详细的分析与讨论，为系统结构的优化设计提供了理论基础。 |
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Abstract: In this paper, the property of silicon micro capacitive accelerometer is analyzed and discussed by establishing the model of sensor, laying the foundation for optimization design of sensor system structure.
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