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| Aerial image distribution of a 0. μm contact hole with traditional mask, rim phase shifting mask (PSM), partial rim PSM, attenuating PSM are calculated based on Hopkins model, and the optimum parameters of different PSM are obtained. |
中文意思：
基于霍普金斯 (Hopkins)理论 ,通过计算 0 . μm方孔的传统透射掩模、边缘相移掩模、部分边缘相移掩模、辅助相移掩模以及衰减相移掩模在硅片表面空间像的光强分布 ,找出了适合于各种相移掩模的最佳参数。 |
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Aerial image distribution of a 0. μm contact hole with traditional mask, rim phase shifting mask (PSM), partial rim PSM, attenuating PSM are calculated based on Hopkins model, and the optimum parameters of different PSM are obtained.
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基于霍普金斯 (Hopkins)理论 ,通过计算 0 . μm方孔的传统透射掩模、边缘相移掩模、部分边缘相移掩模、辅助相移掩模以及衰减相移掩模在硅片表面空间像的光强分布 ,找出了适合于各种相移掩模的最佳参数。 |
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