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Aerial image distribution of a 0. μm contact hole with traditional mask, rim phase shifting mask (PSM), partial rim PSM, attenuating PSM are calculated based on Hopkins model, and the optimum parameters of different PSM are obtained.
中文意思:
基于霍普金斯 (Hopkins)理论 ,通过计算 0 . μm方孔的传统透射掩模、边缘相移掩模、部分边缘相移掩模、辅助相移掩模以及衰减相移掩模在硅片表面空间像的光强分布 ,找出了适合于各种相移掩模的最佳参数。


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Adverse reactions such as salivation,nausea,vomiting in Group A were obviously lower than those in Group B; A组流涎、恶心、呕吐等不良反应明显少于B组。
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Aegidius Romanus is a typical representative of papal ideologists in the th century western debate between the papal and the secular. 埃吉狄厄斯·科朗纳是西方 世纪教、俗论战中教皇派思想家的典型代表。
Aerial image distribution of a 0. μm contact hole with traditional mask, rim phase shifting mask (PSM), partial rim PSM, attenuating PSM are calculated based on Hopkins model, and the optimum parameters of different PSM are obtained. 基于霍普金斯 (Hopkins)理论 ,通过计算 0 . μm方孔的传统透射掩模、边缘相移掩模、部分边缘相移掩模、辅助相移掩模以及衰减相移掩模在硅片表面空间像的光强分布 ,找出了适合于各种相移掩模的最佳参数。
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